Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser
نویسندگان
چکیده
منابع مشابه
Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser
Ten picoseconds (200 kHz) ultrafast laser micro-structuring of piezoelectric substrates including AT-cut quartz, Lithium Niobate and Lithium Tantalate have been studied for the purpose of piezoelectric devices application ranging from surface acoustic wave devices, e.g., bandpass filters, to photonic devices such as optical waveguides and holograms. The study examines the impact of changing sev...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2014
ISSN: 2072-666X
DOI: 10.3390/mi6010019